Vacuum pump, Vacuum technology for the next generation.


Mechanical Booster Pump PRC Series

Mechanical Booster Pump PRC Series

Special features

  • Oil

    Since there is no lubricant in the casing room, stable performance can be obtained even for steam such as water vapor and solvent.

  • Canned motor adopted

    By adopting a canned motor, we were able to eliminate the mechanical seal of the atmosphere/vacuum.It can be used in a clean environment without fear of oil leakage.

  • Corrosion-resistant surface treatment

    The main parts are subjected to anodized treatment with high surface hardness and corrosion resistance, reducing scratches and corrosion inside the pump.No surface treatment is also available as an option.

  • Atmospheric pressure drive type effective for shortening exhaust time (optional: inverter)

    Since it is possible to start simultaneously with the rough pump, the exhaust time can be shortened compared to the standard type.

Use the way

  • Deposition, sputtering, ion plating

  • Vacuum drying, freeze drying, vacuum degassing

  • Analytical instruments, leak testing equipment

  • Gas replacement, filling, vacuum insulation

  • Heat treatment furnace, melting furnace

  • Various other vacuum equipment



Exhaust velocity curve

Exhaust velocity curve Exhaust velocity curve